4/13/2011	7:52:46 AM	Run aborted at 7:52 AM
4/13/2011	7:52:46 AM	Helium valve closed
4/13/2011	7:52:46 AM	H2 valve closed
4/13/2011	7:52:46 AM	BCl3 valve closed
4/13/2011	7:52:46 AM	PH3 valve closed
4/13/2011	7:52:46 AM	SiCl4 pre valve closed
4/13/2011	7:52:46 AM	SiCl4 post valve closed
4/13/2011	7:52:46 AM	Bypass valve closed
4/13/2011	7:52:46 AM	Main Vac valve closed
4/13/2011	7:52:46 AM	Bubbler valve closed
4/13/2011	7:52:46 AM	Helium MFC set to  0.000000
4/13/2011	7:52:46 AM	H2 MFC set to  0.000000
4/13/2011	7:52:46 AM	BCl3 MFC set to  0.000000
4/13/2011	7:52:46 AM	PHl3 MFC set to  0.000000
4/13/2011	7:52:46 AM	SiCl4 MFC set to  0.000000
4/13/2011	7:52:46 AM	Tube furnace set to 0
4/13/2011	7:53:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/13/2011	7:53:54 AM	Recipe started at 7:53 AM
4/13/2011	7:53:54 AM	Helium valve closed
4/13/2011	7:53:54 AM	H2 valve closed
4/13/2011	7:53:54 AM	BCl3 valve closed
4/13/2011	7:53:54 AM	PH3 valve closed
4/13/2011	7:53:54 AM	SiCl4 pre valve closed
4/13/2011	7:53:54 AM	SiCl4 post valve closed
4/13/2011	7:53:54 AM	Main Vac valve closed
4/13/2011	7:53:54 AM	Bubbler valve closed
4/13/2011	7:53:54 AM	Bypass valve opened
4/13/2011	7:53:54 AM	Helium MFC set to  0.000000
4/13/2011	7:53:54 AM	H2 MFC set to  0.000000
4/13/2011	7:53:54 AM	BCl3 MFC set to  0.000000
4/13/2011	7:53:54 AM	PHl3 MFC set to  0.000000
4/13/2011	7:53:54 AM	SiCl4 MFC set to  0.000000
4/13/2011	7:53:54 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	7:53:54 AM	Tube furnace set to 0
4/13/2011	7:54:24 AM	Helium valve closed
4/13/2011	7:54:24 AM	H2 valve closed
4/13/2011	7:54:24 AM	BCl3 valve closed
4/13/2011	7:54:24 AM	PH3 valve closed
4/13/2011	7:54:24 AM	SiCl4 pre valve closed
4/13/2011	7:54:24 AM	SiCl4 post valve closed
4/13/2011	7:54:24 AM	Bubbler valve closed
4/13/2011	7:54:24 AM	Main Vac valve opened
4/13/2011	7:54:24 AM	Bypass valve opened
4/13/2011	7:54:24 AM	Helium MFC set to  0.000000
4/13/2011	7:54:24 AM	H2 MFC set to  0.000000
4/13/2011	7:54:24 AM	BCl3 MFC set to  0.000000
4/13/2011	7:54:24 AM	PHl3 MFC set to  0.000000
4/13/2011	7:54:24 AM	SiCl4 MFC set to  0.000000
4/13/2011	7:54:24 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	7:54:24 AM	Tube furnace set to 0
4/13/2011	7:54:24 AM	Run finished at 7:54 AM
4/13/2011	7:54:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/13/2011	9:43:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/13/2011	9:43:10 AM	Recipe started at 9:43 AM
4/13/2011	9:43:10 AM	H2 valve closed
4/13/2011	9:43:10 AM	BCl3 valve closed
4/13/2011	9:43:10 AM	PH3 valve closed
4/13/2011	9:43:10 AM	SiCl4 pre valve closed
4/13/2011	9:43:10 AM	SiCl4 post valve closed
4/13/2011	9:43:10 AM	Main Vac valve closed
4/13/2011	9:43:10 AM	Bypass valve closed
4/13/2011	9:43:10 AM	Bubbler valve closed
4/13/2011	9:43:10 AM	Helium valve opened
4/13/2011	9:43:10 AM	Helium MFC set to  500.000000
4/13/2011	9:43:10 AM	H2 MFC set to  0.000000
4/13/2011	9:43:10 AM	BCl3 MFC set to  0.000000
4/13/2011	9:43:10 AM	PHl3 MFC set to  0.000000
4/13/2011	9:43:10 AM	SiCl4 MFC set to  0.000000
4/13/2011	9:43:10 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	9:43:10 AM	Tube furnace set to 0
4/13/2011	9:44:29 AM	Helium valve closed
4/13/2011	9:44:29 AM	H2 valve closed
4/13/2011	9:44:29 AM	BCl3 valve closed
4/13/2011	9:44:29 AM	PH3 valve closed
4/13/2011	9:44:29 AM	SiCl4 pre valve closed
4/13/2011	9:44:29 AM	SiCl4 post valve closed
4/13/2011	9:44:29 AM	Main Vac valve closed
4/13/2011	9:44:29 AM	Bypass valve closed
4/13/2011	9:44:29 AM	Bubbler valve closed
4/13/2011	9:44:29 AM	Helium MFC set to  0.000000
4/13/2011	9:44:29 AM	H2 MFC set to  0.000000
4/13/2011	9:44:29 AM	BCl3 MFC set to  0.000000
4/13/2011	9:44:29 AM	PHl3 MFC set to  0.000000
4/13/2011	9:44:29 AM	SiCl4 MFC set to  0.000000
4/13/2011	9:44:29 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	9:44:29 AM	Tube furnace set to 0
4/13/2011	9:44:29 AM	Run finished at 9:44 AM
4/13/2011	9:44:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/13/2011	9:52:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/13/2011	9:52:23 AM	Recipe started at 9:52 AM
4/13/2011	9:52:23 AM	Helium valve closed
4/13/2011	9:52:23 AM	H2 valve closed
4/13/2011	9:52:23 AM	BCl3 valve closed
4/13/2011	9:52:23 AM	PH3 valve closed
4/13/2011	9:52:23 AM	SiCl4 pre valve closed
4/13/2011	9:52:23 AM	SiCl4 post valve closed
4/13/2011	9:52:23 AM	Main Vac valve closed
4/13/2011	9:52:23 AM	Bubbler valve closed
4/13/2011	9:52:23 AM	Bypass valve opened
4/13/2011	9:52:23 AM	Helium MFC set to  0.000000
4/13/2011	9:52:23 AM	H2 MFC set to  0.000000
4/13/2011	9:52:23 AM	BCl3 MFC set to  0.000000
4/13/2011	9:52:23 AM	PHl3 MFC set to  0.000000
4/13/2011	9:52:23 AM	SiCl4 MFC set to  0.000000
4/13/2011	9:52:23 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	9:52:23 AM	Tube furnace set to 0
4/13/2011	9:52:55 AM	Helium valve closed
4/13/2011	9:52:55 AM	H2 valve closed
4/13/2011	9:52:55 AM	BCl3 valve closed
4/13/2011	9:52:55 AM	PH3 valve closed
4/13/2011	9:52:55 AM	SiCl4 pre valve closed
4/13/2011	9:52:55 AM	SiCl4 post valve closed
4/13/2011	9:52:55 AM	Bubbler valve closed
4/13/2011	9:52:55 AM	Main Vac valve opened
4/13/2011	9:52:55 AM	Bypass valve opened
4/13/2011	9:52:55 AM	Helium MFC set to  0.000000
4/13/2011	9:52:55 AM	H2 MFC set to  0.000000
4/13/2011	9:52:55 AM	BCl3 MFC set to  0.000000
4/13/2011	9:52:55 AM	PHl3 MFC set to  0.000000
4/13/2011	9:52:55 AM	SiCl4 MFC set to  0.000000
4/13/2011	9:52:55 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	9:52:55 AM	Tube furnace set to 0
4/13/2011	9:53:55 AM	H2 valve closed
4/13/2011	9:53:55 AM	BCl3 valve closed
4/13/2011	9:53:55 AM	PH3 valve closed
4/13/2011	9:53:55 AM	SiCl4 pre valve closed
4/13/2011	9:53:55 AM	SiCl4 post valve closed
4/13/2011	9:53:55 AM	Bubbler valve closed
4/13/2011	9:53:55 AM	Helium valve opened
4/13/2011	9:53:55 AM	Main Vac valve opened
4/13/2011	9:53:55 AM	Bypass valve opened
4/13/2011	9:53:55 AM	Helium MFC set to  100.000000
4/13/2011	9:53:55 AM	H2 MFC set to  0.000000
4/13/2011	9:53:55 AM	BCl3 MFC set to  0.000000
4/13/2011	9:53:55 AM	PHl3 MFC set to  0.000000
4/13/2011	9:53:55 AM	SiCl4 MFC set to  0.000000
4/13/2011	9:53:55 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	9:53:55 AM	Tube furnace set to 0
4/13/2011	9:54:55 AM	Helium valve closed
4/13/2011	9:54:55 AM	H2 valve closed
4/13/2011	9:54:55 AM	BCl3 valve closed
4/13/2011	9:54:55 AM	PH3 valve closed
4/13/2011	9:54:55 AM	SiCl4 pre valve closed
4/13/2011	9:54:55 AM	SiCl4 post valve closed
4/13/2011	9:54:55 AM	Bubbler valve closed
4/13/2011	9:54:55 AM	Main Vac valve opened
4/13/2011	9:54:55 AM	Bypass valve opened
4/13/2011	9:54:55 AM	Helium MFC set to  0.000000
4/13/2011	9:54:55 AM	H2 MFC set to  0.000000
4/13/2011	9:54:55 AM	BCl3 MFC set to  0.000000
4/13/2011	9:54:55 AM	PHl3 MFC set to  0.000000
4/13/2011	9:54:55 AM	SiCl4 MFC set to  0.000000
4/13/2011	9:54:55 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	9:54:55 AM	Tube furnace set to 0
4/13/2011	9:55:55 AM	H2 valve closed
4/13/2011	9:55:55 AM	BCl3 valve closed
4/13/2011	9:55:55 AM	PH3 valve closed
4/13/2011	9:55:55 AM	SiCl4 pre valve closed
4/13/2011	9:55:55 AM	SiCl4 post valve closed
4/13/2011	9:55:55 AM	Bubbler valve closed
4/13/2011	9:55:55 AM	Helium valve opened
4/13/2011	9:55:55 AM	Main Vac valve opened
4/13/2011	9:55:55 AM	Bypass valve opened
4/13/2011	9:55:55 AM	Helium MFC set to  100.000000
4/13/2011	9:55:55 AM	H2 MFC set to  0.000000
4/13/2011	9:55:55 AM	BCl3 MFC set to  0.000000
4/13/2011	9:55:55 AM	PHl3 MFC set to  0.000000
4/13/2011	9:55:55 AM	SiCl4 MFC set to  0.000000
4/13/2011	9:55:55 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	9:55:56 AM	Tube furnace set to 0
4/13/2011	9:56:56 AM	Helium valve closed
4/13/2011	9:56:56 AM	H2 valve closed
4/13/2011	9:56:56 AM	BCl3 valve closed
4/13/2011	9:56:56 AM	PH3 valve closed
4/13/2011	9:56:56 AM	SiCl4 pre valve closed
4/13/2011	9:56:56 AM	SiCl4 post valve closed
4/13/2011	9:56:56 AM	Bubbler valve closed
4/13/2011	9:56:56 AM	Main Vac valve opened
4/13/2011	9:56:56 AM	Bypass valve opened
4/13/2011	9:56:56 AM	Helium MFC set to  0.000000
4/13/2011	9:56:56 AM	H2 MFC set to  0.000000
4/13/2011	9:56:56 AM	BCl3 MFC set to  0.000000
4/13/2011	9:56:56 AM	PHl3 MFC set to  0.000000
4/13/2011	9:56:56 AM	SiCl4 MFC set to  0.000000
4/13/2011	9:56:56 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	9:56:56 AM	Tube furnace set to 0
4/13/2011	9:57:56 AM	H2 valve closed
4/13/2011	9:57:56 AM	BCl3 valve closed
4/13/2011	9:57:56 AM	PH3 valve closed
4/13/2011	9:57:56 AM	SiCl4 pre valve closed
4/13/2011	9:57:56 AM	SiCl4 post valve closed
4/13/2011	9:57:56 AM	Bubbler valve closed
4/13/2011	9:57:56 AM	Helium valve opened
4/13/2011	9:57:56 AM	Main Vac valve opened
4/13/2011	9:57:56 AM	Bypass valve opened
4/13/2011	9:57:56 AM	Helium MFC set to  100.000000
4/13/2011	9:57:56 AM	H2 MFC set to  0.000000
4/13/2011	9:57:56 AM	BCl3 MFC set to  0.000000
4/13/2011	9:57:56 AM	PHl3 MFC set to  0.000000
4/13/2011	9:57:56 AM	SiCl4 MFC set to  0.000000
4/13/2011	9:57:56 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	9:57:56 AM	Tube furnace set to 0
4/13/2011	9:58:56 AM	Helium valve closed
4/13/2011	9:58:56 AM	H2 valve closed
4/13/2011	9:58:56 AM	BCl3 valve closed
4/13/2011	9:58:56 AM	PH3 valve closed
4/13/2011	9:58:56 AM	SiCl4 pre valve closed
4/13/2011	9:58:56 AM	SiCl4 post valve closed
4/13/2011	9:58:56 AM	Bubbler valve closed
4/13/2011	9:58:56 AM	Main Vac valve opened
4/13/2011	9:58:56 AM	Bypass valve opened
4/13/2011	9:58:56 AM	Helium MFC set to  0.000000
4/13/2011	9:58:56 AM	H2 MFC set to  0.000000
4/13/2011	9:58:56 AM	BCl3 MFC set to  0.000000
4/13/2011	9:58:56 AM	PHl3 MFC set to  0.000000
4/13/2011	9:58:56 AM	SiCl4 MFC set to  0.000000
4/13/2011	9:58:56 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	9:58:56 AM	Tube furnace set to 0
4/13/2011	9:59:56 AM	H2 valve closed
4/13/2011	9:59:56 AM	BCl3 valve closed
4/13/2011	9:59:56 AM	PH3 valve closed
4/13/2011	9:59:56 AM	SiCl4 pre valve closed
4/13/2011	9:59:56 AM	SiCl4 post valve closed
4/13/2011	9:59:56 AM	Bubbler valve closed
4/13/2011	9:59:56 AM	Helium valve opened
4/13/2011	9:59:56 AM	Main Vac valve opened
4/13/2011	9:59:56 AM	Bypass valve opened
4/13/2011	9:59:56 AM	Helium MFC set to  100.000000
4/13/2011	9:59:56 AM	H2 MFC set to  0.000000
4/13/2011	9:59:56 AM	BCl3 MFC set to  0.000000
4/13/2011	9:59:56 AM	PHl3 MFC set to  0.000000
4/13/2011	9:59:56 AM	SiCl4 MFC set to  0.000000
4/13/2011	9:59:56 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	9:59:56 AM	Tube furnace set to 0
4/13/2011	10:00:57 AM	Helium valve closed
4/13/2011	10:00:57 AM	H2 valve closed
4/13/2011	10:00:57 AM	BCl3 valve closed
4/13/2011	10:00:57 AM	PH3 valve closed
4/13/2011	10:00:57 AM	SiCl4 pre valve closed
4/13/2011	10:00:57 AM	SiCl4 post valve closed
4/13/2011	10:00:57 AM	Bubbler valve closed
4/13/2011	10:00:57 AM	Main Vac valve opened
4/13/2011	10:00:57 AM	Bypass valve opened
4/13/2011	10:00:57 AM	Helium MFC set to  0.000000
4/13/2011	10:00:57 AM	H2 MFC set to  0.000000
4/13/2011	10:00:57 AM	BCl3 MFC set to  0.000000
4/13/2011	10:00:57 AM	PHl3 MFC set to  0.000000
4/13/2011	10:00:57 AM	SiCl4 MFC set to  0.000000
4/13/2011	10:00:57 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	10:00:57 AM	Tube furnace set to 0
4/13/2011	10:01:57 AM	H2 valve closed
4/13/2011	10:01:57 AM	BCl3 valve closed
4/13/2011	10:01:57 AM	PH3 valve closed
4/13/2011	10:01:57 AM	SiCl4 pre valve closed
4/13/2011	10:01:57 AM	SiCl4 post valve closed
4/13/2011	10:01:57 AM	Bubbler valve closed
4/13/2011	10:01:57 AM	Helium valve opened
4/13/2011	10:01:57 AM	Main Vac valve opened
4/13/2011	10:01:57 AM	Bypass valve opened
4/13/2011	10:01:57 AM	Helium MFC set to  100.000000
4/13/2011	10:01:57 AM	H2 MFC set to  0.000000
4/13/2011	10:01:57 AM	BCl3 MFC set to  0.000000
4/13/2011	10:01:57 AM	PHl3 MFC set to  0.000000
4/13/2011	10:01:57 AM	SiCl4 MFC set to  0.000000
4/13/2011	10:01:57 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	10:01:57 AM	Tube furnace set to 0
4/13/2011	10:02:57 AM	Helium valve closed
4/13/2011	10:02:57 AM	H2 valve closed
4/13/2011	10:02:57 AM	BCl3 valve closed
4/13/2011	10:02:57 AM	PH3 valve closed
4/13/2011	10:02:57 AM	SiCl4 pre valve closed
4/13/2011	10:02:57 AM	SiCl4 post valve closed
4/13/2011	10:02:57 AM	Bubbler valve closed
4/13/2011	10:02:57 AM	Main Vac valve opened
4/13/2011	10:02:57 AM	Bypass valve opened
4/13/2011	10:02:57 AM	Helium MFC set to  0.000000
4/13/2011	10:02:57 AM	H2 MFC set to  0.000000
4/13/2011	10:02:57 AM	BCl3 MFC set to  0.000000
4/13/2011	10:02:57 AM	PHl3 MFC set to  0.000000
4/13/2011	10:02:57 AM	SiCl4 MFC set to  0.000000
4/13/2011	10:02:57 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	10:02:57 AM	Tube furnace set to 0
4/13/2011	10:03:57 AM	H2 valve closed
4/13/2011	10:03:57 AM	BCl3 valve closed
4/13/2011	10:03:57 AM	PH3 valve closed
4/13/2011	10:03:57 AM	SiCl4 pre valve closed
4/13/2011	10:03:57 AM	SiCl4 post valve closed
4/13/2011	10:03:57 AM	Bubbler valve closed
4/13/2011	10:03:57 AM	Helium valve opened
4/13/2011	10:03:57 AM	Main Vac valve opened
4/13/2011	10:03:57 AM	Bypass valve opened
4/13/2011	10:03:57 AM	Helium MFC set to  100.000000
4/13/2011	10:03:57 AM	H2 MFC set to  0.000000
4/13/2011	10:03:57 AM	BCl3 MFC set to  0.000000
4/13/2011	10:03:57 AM	PHl3 MFC set to  0.000000
4/13/2011	10:03:57 AM	SiCl4 MFC set to  0.000000
4/13/2011	10:03:57 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	10:03:57 AM	Tube furnace set to 0
4/13/2011	10:04:57 AM	Helium valve closed
4/13/2011	10:04:57 AM	H2 valve closed
4/13/2011	10:04:57 AM	BCl3 valve closed
4/13/2011	10:04:57 AM	PH3 valve closed
4/13/2011	10:04:57 AM	SiCl4 pre valve closed
4/13/2011	10:04:57 AM	SiCl4 post valve closed
4/13/2011	10:04:57 AM	Bubbler valve closed
4/13/2011	10:04:57 AM	Main Vac valve opened
4/13/2011	10:04:57 AM	Bypass valve opened
4/13/2011	10:04:57 AM	Helium MFC set to  0.000000
4/13/2011	10:04:57 AM	H2 MFC set to  0.000000
4/13/2011	10:04:57 AM	BCl3 MFC set to  0.000000
4/13/2011	10:04:57 AM	PHl3 MFC set to  0.000000
4/13/2011	10:04:57 AM	SiCl4 MFC set to  0.000000
4/13/2011	10:04:57 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	10:04:57 AM	Tube furnace set to 0
4/13/2011	10:05:58 AM	H2 valve closed
4/13/2011	10:05:58 AM	BCl3 valve closed
4/13/2011	10:05:58 AM	PH3 valve closed
4/13/2011	10:05:58 AM	SiCl4 pre valve closed
4/13/2011	10:05:58 AM	SiCl4 post valve closed
4/13/2011	10:05:58 AM	Bubbler valve closed
4/13/2011	10:05:58 AM	Helium valve opened
4/13/2011	10:05:58 AM	Main Vac valve opened
4/13/2011	10:05:58 AM	Bypass valve opened
4/13/2011	10:05:58 AM	Helium MFC set to  100.000000
4/13/2011	10:05:58 AM	H2 MFC set to  0.000000
4/13/2011	10:05:58 AM	BCl3 MFC set to  0.000000
4/13/2011	10:05:58 AM	PHl3 MFC set to  0.000000
4/13/2011	10:05:58 AM	SiCl4 MFC set to  0.000000
4/13/2011	10:05:58 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	10:05:58 AM	Tube furnace set to 0
4/13/2011	10:06:58 AM	Helium valve closed
4/13/2011	10:06:58 AM	H2 valve closed
4/13/2011	10:06:58 AM	BCl3 valve closed
4/13/2011	10:06:58 AM	PH3 valve closed
4/13/2011	10:06:58 AM	SiCl4 pre valve closed
4/13/2011	10:06:58 AM	SiCl4 post valve closed
4/13/2011	10:06:58 AM	Bubbler valve closed
4/13/2011	10:06:58 AM	Main Vac valve opened
4/13/2011	10:06:58 AM	Bypass valve opened
4/13/2011	10:06:58 AM	Helium MFC set to  0.000000
4/13/2011	10:06:58 AM	H2 MFC set to  0.000000
4/13/2011	10:06:58 AM	BCl3 MFC set to  0.000000
4/13/2011	10:06:58 AM	PHl3 MFC set to  0.000000
4/13/2011	10:06:58 AM	SiCl4 MFC set to  0.000000
4/13/2011	10:06:58 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	10:06:58 AM	Tube furnace set to 0
4/13/2011	10:07:58 AM	H2 valve closed
4/13/2011	10:07:58 AM	BCl3 valve closed
4/13/2011	10:07:58 AM	PH3 valve closed
4/13/2011	10:07:58 AM	SiCl4 pre valve closed
4/13/2011	10:07:58 AM	SiCl4 post valve closed
4/13/2011	10:07:58 AM	Bubbler valve closed
4/13/2011	10:07:58 AM	Helium valve opened
4/13/2011	10:07:58 AM	Main Vac valve opened
4/13/2011	10:07:58 AM	Bypass valve opened
4/13/2011	10:07:58 AM	Helium MFC set to  100.000000
4/13/2011	10:07:58 AM	H2 MFC set to  0.000000
4/13/2011	10:07:58 AM	BCl3 MFC set to  0.000000
4/13/2011	10:07:58 AM	PHl3 MFC set to  0.000000
4/13/2011	10:07:58 AM	SiCl4 MFC set to  0.000000
4/13/2011	10:07:58 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	10:07:58 AM	Tube furnace set to 0
4/13/2011	10:08:58 AM	Helium valve closed
4/13/2011	10:08:58 AM	H2 valve closed
4/13/2011	10:08:58 AM	BCl3 valve closed
4/13/2011	10:08:58 AM	PH3 valve closed
4/13/2011	10:08:58 AM	SiCl4 pre valve closed
4/13/2011	10:08:58 AM	SiCl4 post valve closed
4/13/2011	10:08:58 AM	Bubbler valve closed
4/13/2011	10:08:58 AM	Main Vac valve opened
4/13/2011	10:08:58 AM	Bypass valve opened
4/13/2011	10:08:58 AM	Helium MFC set to  0.000000
4/13/2011	10:08:58 AM	H2 MFC set to  0.000000
4/13/2011	10:08:58 AM	BCl3 MFC set to  0.000000
4/13/2011	10:08:58 AM	PHl3 MFC set to  0.000000
4/13/2011	10:08:58 AM	SiCl4 MFC set to  0.000000
4/13/2011	10:08:58 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	10:08:58 AM	Tube furnace set to 0
4/13/2011	10:09:58 AM	H2 valve closed
4/13/2011	10:09:58 AM	BCl3 valve closed
4/13/2011	10:09:58 AM	PH3 valve closed
4/13/2011	10:09:58 AM	SiCl4 pre valve closed
4/13/2011	10:09:58 AM	SiCl4 post valve closed
4/13/2011	10:09:58 AM	Bubbler valve closed
4/13/2011	10:09:58 AM	Helium valve opened
4/13/2011	10:09:58 AM	Main Vac valve opened
4/13/2011	10:09:58 AM	Bypass valve opened
4/13/2011	10:09:58 AM	Helium MFC set to  100.000000
4/13/2011	10:09:58 AM	H2 MFC set to  0.000000
4/13/2011	10:09:58 AM	BCl3 MFC set to  0.000000
4/13/2011	10:09:58 AM	PHl3 MFC set to  0.000000
4/13/2011	10:09:58 AM	SiCl4 MFC set to  0.000000
4/13/2011	10:09:58 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	10:09:59 AM	Tube furnace set to 0
4/13/2011	10:10:59 AM	Helium valve closed
4/13/2011	10:10:59 AM	H2 valve closed
4/13/2011	10:10:59 AM	BCl3 valve closed
4/13/2011	10:10:59 AM	PH3 valve closed
4/13/2011	10:10:59 AM	SiCl4 pre valve closed
4/13/2011	10:10:59 AM	SiCl4 post valve closed
4/13/2011	10:10:59 AM	Bubbler valve closed
4/13/2011	10:10:59 AM	Main Vac valve opened
4/13/2011	10:10:59 AM	Bypass valve opened
4/13/2011	10:10:59 AM	Helium MFC set to  0.000000
4/13/2011	10:10:59 AM	H2 MFC set to  0.000000
4/13/2011	10:10:59 AM	BCl3 MFC set to  0.000000
4/13/2011	10:10:59 AM	PHl3 MFC set to  0.000000
4/13/2011	10:10:59 AM	SiCl4 MFC set to  0.000000
4/13/2011	10:10:59 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	10:10:59 AM	Tube furnace set to 0
4/13/2011	10:11:59 AM	H2 valve closed
4/13/2011	10:11:59 AM	BCl3 valve closed
4/13/2011	10:11:59 AM	PH3 valve closed
4/13/2011	10:11:59 AM	SiCl4 pre valve closed
4/13/2011	10:11:59 AM	SiCl4 post valve closed
4/13/2011	10:11:59 AM	Bubbler valve closed
4/13/2011	10:11:59 AM	Helium valve opened
4/13/2011	10:11:59 AM	Main Vac valve opened
4/13/2011	10:11:59 AM	Bypass valve opened
4/13/2011	10:11:59 AM	Helium MFC set to  100.000000
4/13/2011	10:11:59 AM	H2 MFC set to  0.000000
4/13/2011	10:11:59 AM	BCl3 MFC set to  0.000000
4/13/2011	10:11:59 AM	PHl3 MFC set to  0.000000
4/13/2011	10:11:59 AM	SiCl4 MFC set to  0.000000
4/13/2011	10:11:59 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	10:11:59 AM	Tube furnace set to 0
4/13/2011	10:12:59 AM	Helium valve closed
4/13/2011	10:12:59 AM	H2 valve closed
4/13/2011	10:12:59 AM	BCl3 valve closed
4/13/2011	10:12:59 AM	PH3 valve closed
4/13/2011	10:12:59 AM	SiCl4 pre valve closed
4/13/2011	10:12:59 AM	SiCl4 post valve closed
4/13/2011	10:12:59 AM	Bubbler valve closed
4/13/2011	10:12:59 AM	Main Vac valve opened
4/13/2011	10:12:59 AM	Bypass valve opened
4/13/2011	10:12:59 AM	Helium MFC set to  0.000000
4/13/2011	10:12:59 AM	H2 MFC set to  0.000000
4/13/2011	10:12:59 AM	BCl3 MFC set to  0.000000
4/13/2011	10:12:59 AM	PHl3 MFC set to  0.000000
4/13/2011	10:12:59 AM	SiCl4 MFC set to  0.000000
4/13/2011	10:12:59 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	10:12:59 AM	Tube furnace set to 0
4/13/2011	10:13:00 AM	Run finished at 10:13 AM
4/13/2011	10:13:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/13/2011	10:20:41 AM	Main Vac valve closed
4/13/2011	10:20:54 AM	Main Vac valve opened
4/13/2011	10:21:32 AM	Recipe started at 10:21 AM
4/13/2011	10:21:32 AM	Helium valve closed
4/13/2011	10:21:32 AM	BCl3 valve closed
4/13/2011	10:21:32 AM	PH3 valve closed
4/13/2011	10:21:32 AM	SiCl4 pre valve closed
4/13/2011	10:21:32 AM	SiCl4 post valve closed
4/13/2011	10:21:32 AM	Main Vac valve closed
4/13/2011	10:21:32 AM	Bypass valve closed
4/13/2011	10:21:32 AM	Bubbler valve closed
4/13/2011	10:21:32 AM	H2 valve opened
4/13/2011	10:21:32 AM	Helium MFC set to  0.000000
4/13/2011	10:21:32 AM	H2 MFC set to  500.000000
4/13/2011	10:21:32 AM	BCl3 MFC set to  0.000000
4/13/2011	10:21:32 AM	PHl3 MFC set to  0.000000
4/13/2011	10:21:32 AM	SiCl4 MFC set to  0.000000
4/13/2011	10:21:32 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	10:21:32 AM	Tube furnace set to 0
4/13/2011	10:22:55 AM	Helium valve closed
4/13/2011	10:22:55 AM	BCl3 valve closed
4/13/2011	10:22:55 AM	PH3 valve closed
4/13/2011	10:22:55 AM	SiCl4 pre valve closed
4/13/2011	10:22:55 AM	SiCl4 post valve closed
4/13/2011	10:22:56 AM	Main Vac valve closed
4/13/2011	10:22:56 AM	Bypass valve closed
4/13/2011	10:22:56 AM	H2 valve opened
4/13/2011	10:22:56 AM	Bubbler valve opened
4/13/2011	10:22:56 AM	Helium MFC set to  0.000000
4/13/2011	10:22:56 AM	H2 MFC set to  500.000000
4/13/2011	10:22:56 AM	BCl3 MFC set to  0.000000
4/13/2011	10:22:56 AM	PHl3 MFC set to  0.000000
4/13/2011	10:22:56 AM	SiCl4 MFC set to  0.000000
4/13/2011	10:22:56 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	10:22:56 AM	Tube furnace set to 1000
4/13/2011	10:42:56 AM	Helium valve closed
4/13/2011	10:42:56 AM	PH3 valve closed
4/13/2011	10:42:56 AM	Main Vac valve closed
4/13/2011	10:42:56 AM	Bypass valve closed
4/13/2011	10:42:56 AM	H2 valve opened
4/13/2011	10:42:56 AM	BCl3 valve opened
4/13/2011	10:42:56 AM	SiCl4 pre valve opened
4/13/2011	10:42:56 AM	SiCl4 post valve opened
4/13/2011	10:42:56 AM	Bubbler valve opened
4/13/2011	10:42:56 AM	Helium MFC set to  0.000000
4/13/2011	10:42:56 AM	H2 MFC set to  500.000000
4/13/2011	10:42:56 AM	BCl3 MFC set to  3.000000
4/13/2011	10:42:56 AM	PHl3 MFC set to  0.000000
4/13/2011	10:42:56 AM	SiCl4 MFC set to  50.000000
4/13/2011	10:42:56 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	10:42:56 AM	Tube furnace set to 1000
4/13/2011	11:02:56 AM	H2 valve closed
4/13/2011	11:02:56 AM	BCl3 valve closed
4/13/2011	11:02:56 AM	PH3 valve closed
4/13/2011	11:02:56 AM	SiCl4 pre valve closed
4/13/2011	11:02:56 AM	SiCl4 post valve closed
4/13/2011	11:02:56 AM	Main Vac valve closed
4/13/2011	11:02:56 AM	Bypass valve closed
4/13/2011	11:02:56 AM	Helium valve opened
4/13/2011	11:02:56 AM	Bubbler valve opened
4/13/2011	11:02:56 AM	Helium MFC set to  500.000000
4/13/2011	11:02:56 AM	H2 MFC set to  0.000000
4/13/2011	11:02:56 AM	BCl3 MFC set to  0.000000
4/13/2011	11:02:56 AM	PHl3 MFC set to  0.000000
4/13/2011	11:02:56 AM	SiCl4 MFC set to  0.000000
4/13/2011	11:02:56 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	11:02:56 AM	Tube furnace set to 0
4/13/2011	11:22:56 AM	Helium valve closed
4/13/2011	11:22:56 AM	H2 valve closed
4/13/2011	11:22:56 AM	BCl3 valve closed
4/13/2011	11:22:56 AM	PH3 valve closed
4/13/2011	11:22:56 AM	SiCl4 pre valve closed
4/13/2011	11:22:56 AM	SiCl4 post valve closed
4/13/2011	11:22:56 AM	Main Vac valve closed
4/13/2011	11:22:56 AM	Bypass valve closed
4/13/2011	11:22:56 AM	Bubbler valve closed
4/13/2011	11:22:56 AM	Helium MFC set to  0.000000
4/13/2011	11:22:56 AM	H2 MFC set to  0.000000
4/13/2011	11:22:56 AM	BCl3 MFC set to  0.000000
4/13/2011	11:22:56 AM	PHl3 MFC set to  0.000000
4/13/2011	11:22:56 AM	SiCl4 MFC set to  0.000000
4/13/2011	11:22:56 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	11:22:56 AM	Tube furnace set to 0
4/13/2011	11:22:57 AM	Run finished at 11:22 AM
4/13/2011	11:27:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/13/2011	11:27:34 AM	Recipe started at 11:27 AM
4/13/2011	11:27:34 AM	H2 valve closed
4/13/2011	11:27:34 AM	BCl3 valve closed
4/13/2011	11:27:34 AM	PH3 valve closed
4/13/2011	11:27:34 AM	SiCl4 pre valve closed
4/13/2011	11:27:34 AM	SiCl4 post valve closed
4/13/2011	11:27:34 AM	Main Vac valve closed
4/13/2011	11:27:34 AM	Bypass valve closed
4/13/2011	11:27:34 AM	Bubbler valve closed
4/13/2011	11:27:34 AM	Helium valve opened
4/13/2011	11:27:34 AM	Helium MFC set to  500.000000
4/13/2011	11:27:34 AM	H2 MFC set to  0.000000
4/13/2011	11:27:34 AM	BCl3 MFC set to  0.000000
4/13/2011	11:27:34 AM	PHl3 MFC set to  0.000000
4/13/2011	11:27:34 AM	SiCl4 MFC set to  0.000000
4/13/2011	11:27:34 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	11:27:35 AM	Tube furnace set to 0
4/13/2011	11:27:35 AM	Helium valve closed
4/13/2011	11:27:35 AM	H2 valve closed
4/13/2011	11:27:35 AM	BCl3 valve closed
4/13/2011	11:27:35 AM	PH3 valve closed
4/13/2011	11:27:35 AM	SiCl4 pre valve closed
4/13/2011	11:27:35 AM	SiCl4 post valve closed
4/13/2011	11:27:35 AM	Main Vac valve closed
4/13/2011	11:27:35 AM	Bypass valve closed
4/13/2011	11:27:35 AM	Bubbler valve closed
4/13/2011	11:27:35 AM	Helium MFC set to  0.000000
4/13/2011	11:27:35 AM	H2 MFC set to  0.000000
4/13/2011	11:27:35 AM	BCl3 MFC set to  0.000000
4/13/2011	11:27:35 AM	PHl3 MFC set to  0.000000
4/13/2011	11:27:35 AM	SiCl4 MFC set to  0.000000
4/13/2011	11:27:35 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	11:27:35 AM	Tube furnace set to 0
4/13/2011	11:27:35 AM	Run finished at 11:27 AM
4/13/2011	11:27:35 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/13/2011	11:34:05 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/13/2011	11:34:18 AM	Recipe started at 11:34 AM
4/13/2011	11:34:18 AM	Helium valve closed
4/13/2011	11:34:18 AM	H2 valve closed
4/13/2011	11:34:18 AM	BCl3 valve closed
4/13/2011	11:34:18 AM	PH3 valve closed
4/13/2011	11:34:18 AM	SiCl4 pre valve closed
4/13/2011	11:34:18 AM	SiCl4 post valve closed
4/13/2011	11:34:18 AM	Main Vac valve closed
4/13/2011	11:34:18 AM	Bubbler valve closed
4/13/2011	11:34:18 AM	Bypass valve opened
4/13/2011	11:34:18 AM	Helium MFC set to  0.000000
4/13/2011	11:34:18 AM	H2 MFC set to  0.000000
4/13/2011	11:34:18 AM	BCl3 MFC set to  0.000000
4/13/2011	11:34:18 AM	PHl3 MFC set to  0.000000
4/13/2011	11:34:18 AM	SiCl4 MFC set to  0.000000
4/13/2011	11:34:18 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	11:34:18 AM	Tube furnace set to 0
4/13/2011	11:34:51 AM	Helium valve closed
4/13/2011	11:34:51 AM	H2 valve closed
4/13/2011	11:34:51 AM	BCl3 valve closed
4/13/2011	11:34:51 AM	PH3 valve closed
4/13/2011	11:34:51 AM	SiCl4 pre valve closed
4/13/2011	11:34:51 AM	SiCl4 post valve closed
4/13/2011	11:34:51 AM	Bubbler valve closed
4/13/2011	11:34:51 AM	Main Vac valve opened
4/13/2011	11:34:51 AM	Bypass valve opened
4/13/2011	11:34:51 AM	Helium MFC set to  0.000000
4/13/2011	11:34:51 AM	H2 MFC set to  0.000000
4/13/2011	11:34:51 AM	BCl3 MFC set to  0.000000
4/13/2011	11:34:51 AM	PHl3 MFC set to  0.000000
4/13/2011	11:34:51 AM	SiCl4 MFC set to  0.000000
4/13/2011	11:34:51 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	11:34:51 AM	Tube furnace set to 0
4/13/2011	11:35:51 AM	H2 valve closed
4/13/2011	11:35:51 AM	BCl3 valve closed
4/13/2011	11:35:51 AM	PH3 valve closed
4/13/2011	11:35:51 AM	SiCl4 pre valve closed
4/13/2011	11:35:51 AM	SiCl4 post valve closed
4/13/2011	11:35:51 AM	Bubbler valve closed
4/13/2011	11:35:51 AM	Helium valve opened
4/13/2011	11:35:51 AM	Main Vac valve opened
4/13/2011	11:35:51 AM	Bypass valve opened
4/13/2011	11:35:51 AM	Helium MFC set to  100.000000
4/13/2011	11:35:51 AM	H2 MFC set to  0.000000
4/13/2011	11:35:51 AM	BCl3 MFC set to  0.000000
4/13/2011	11:35:51 AM	PHl3 MFC set to  0.000000
4/13/2011	11:35:51 AM	SiCl4 MFC set to  0.000000
4/13/2011	11:35:51 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	11:35:51 AM	Tube furnace set to 0
4/13/2011	11:36:51 AM	Helium valve closed
4/13/2011	11:36:51 AM	H2 valve closed
4/13/2011	11:36:51 AM	BCl3 valve closed
4/13/2011	11:36:51 AM	PH3 valve closed
4/13/2011	11:36:51 AM	SiCl4 pre valve closed
4/13/2011	11:36:51 AM	SiCl4 post valve closed
4/13/2011	11:36:51 AM	Bubbler valve closed
4/13/2011	11:36:51 AM	Main Vac valve opened
4/13/2011	11:36:51 AM	Bypass valve opened
4/13/2011	11:36:51 AM	Helium MFC set to  0.000000
4/13/2011	11:36:51 AM	H2 MFC set to  0.000000
4/13/2011	11:36:51 AM	BCl3 MFC set to  0.000000
4/13/2011	11:36:51 AM	PHl3 MFC set to  0.000000
4/13/2011	11:36:51 AM	SiCl4 MFC set to  0.000000
4/13/2011	11:36:51 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	11:36:51 AM	Tube furnace set to 0
4/13/2011	11:37:51 AM	H2 valve closed
4/13/2011	11:37:51 AM	BCl3 valve closed
4/13/2011	11:37:51 AM	PH3 valve closed
4/13/2011	11:37:51 AM	SiCl4 pre valve closed
4/13/2011	11:37:51 AM	SiCl4 post valve closed
4/13/2011	11:37:51 AM	Bubbler valve closed
4/13/2011	11:37:51 AM	Helium valve opened
4/13/2011	11:37:51 AM	Main Vac valve opened
4/13/2011	11:37:51 AM	Bypass valve opened
4/13/2011	11:37:51 AM	Helium MFC set to  100.000000
4/13/2011	11:37:51 AM	H2 MFC set to  0.000000
4/13/2011	11:37:51 AM	BCl3 MFC set to  0.000000
4/13/2011	11:37:51 AM	PHl3 MFC set to  0.000000
4/13/2011	11:37:51 AM	SiCl4 MFC set to  0.000000
4/13/2011	11:37:51 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	11:37:51 AM	Tube furnace set to 0
4/13/2011	11:38:51 AM	Helium valve closed
4/13/2011	11:38:51 AM	H2 valve closed
4/13/2011	11:38:51 AM	BCl3 valve closed
4/13/2011	11:38:51 AM	PH3 valve closed
4/13/2011	11:38:51 AM	SiCl4 pre valve closed
4/13/2011	11:38:51 AM	SiCl4 post valve closed
4/13/2011	11:38:51 AM	Bubbler valve closed
4/13/2011	11:38:51 AM	Main Vac valve opened
4/13/2011	11:38:51 AM	Bypass valve opened
4/13/2011	11:38:51 AM	Helium MFC set to  0.000000
4/13/2011	11:38:51 AM	H2 MFC set to  0.000000
4/13/2011	11:38:51 AM	BCl3 MFC set to  0.000000
4/13/2011	11:38:51 AM	PHl3 MFC set to  0.000000
4/13/2011	11:38:51 AM	SiCl4 MFC set to  0.000000
4/13/2011	11:38:51 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	11:38:52 AM	Tube furnace set to 0
4/13/2011	11:39:52 AM	H2 valve closed
4/13/2011	11:39:52 AM	BCl3 valve closed
4/13/2011	11:39:52 AM	PH3 valve closed
4/13/2011	11:39:52 AM	SiCl4 pre valve closed
4/13/2011	11:39:52 AM	SiCl4 post valve closed
4/13/2011	11:39:52 AM	Bubbler valve closed
4/13/2011	11:39:52 AM	Helium valve opened
4/13/2011	11:39:52 AM	Main Vac valve opened
4/13/2011	11:39:52 AM	Bypass valve opened
4/13/2011	11:39:52 AM	Helium MFC set to  100.000000
4/13/2011	11:39:52 AM	H2 MFC set to  0.000000
4/13/2011	11:39:52 AM	BCl3 MFC set to  0.000000
4/13/2011	11:39:52 AM	PHl3 MFC set to  0.000000
4/13/2011	11:39:52 AM	SiCl4 MFC set to  0.000000
4/13/2011	11:39:52 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	11:39:52 AM	Tube furnace set to 0
4/13/2011	11:40:52 AM	Helium valve closed
4/13/2011	11:40:52 AM	H2 valve closed
4/13/2011	11:40:52 AM	BCl3 valve closed
4/13/2011	11:40:52 AM	PH3 valve closed
4/13/2011	11:40:52 AM	SiCl4 pre valve closed
4/13/2011	11:40:52 AM	SiCl4 post valve closed
4/13/2011	11:40:52 AM	Bubbler valve closed
4/13/2011	11:40:52 AM	Main Vac valve opened
4/13/2011	11:40:52 AM	Bypass valve opened
4/13/2011	11:40:52 AM	Helium MFC set to  0.000000
4/13/2011	11:40:52 AM	H2 MFC set to  0.000000
4/13/2011	11:40:52 AM	BCl3 MFC set to  0.000000
4/13/2011	11:40:52 AM	PHl3 MFC set to  0.000000
4/13/2011	11:40:52 AM	SiCl4 MFC set to  0.000000
4/13/2011	11:40:52 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	11:40:52 AM	Tube furnace set to 0
4/13/2011	11:41:52 AM	H2 valve closed
4/13/2011	11:41:52 AM	BCl3 valve closed
4/13/2011	11:41:52 AM	PH3 valve closed
4/13/2011	11:41:52 AM	SiCl4 pre valve closed
4/13/2011	11:41:52 AM	SiCl4 post valve closed
4/13/2011	11:41:52 AM	Bubbler valve closed
4/13/2011	11:41:52 AM	Helium valve opened
4/13/2011	11:41:52 AM	Main Vac valve opened
4/13/2011	11:41:52 AM	Bypass valve opened
4/13/2011	11:41:52 AM	Helium MFC set to  100.000000
4/13/2011	11:41:52 AM	H2 MFC set to  0.000000
4/13/2011	11:41:52 AM	BCl3 MFC set to  0.000000
4/13/2011	11:41:52 AM	PHl3 MFC set to  0.000000
4/13/2011	11:41:52 AM	SiCl4 MFC set to  0.000000
4/13/2011	11:41:52 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	11:41:52 AM	Tube furnace set to 0
4/13/2011	11:42:52 AM	Helium valve closed
4/13/2011	11:42:52 AM	H2 valve closed
4/13/2011	11:42:52 AM	BCl3 valve closed
4/13/2011	11:42:52 AM	PH3 valve closed
4/13/2011	11:42:52 AM	SiCl4 pre valve closed
4/13/2011	11:42:52 AM	SiCl4 post valve closed
4/13/2011	11:42:52 AM	Bubbler valve closed
4/13/2011	11:42:52 AM	Main Vac valve opened
4/13/2011	11:42:52 AM	Bypass valve opened
4/13/2011	11:42:52 AM	Helium MFC set to  0.000000
4/13/2011	11:42:52 AM	H2 MFC set to  0.000000
4/13/2011	11:42:52 AM	BCl3 MFC set to  0.000000
4/13/2011	11:42:52 AM	PHl3 MFC set to  0.000000
4/13/2011	11:42:52 AM	SiCl4 MFC set to  0.000000
4/13/2011	11:42:52 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	11:42:52 AM	Tube furnace set to 0
4/13/2011	11:43:52 AM	H2 valve closed
4/13/2011	11:43:52 AM	BCl3 valve closed
4/13/2011	11:43:52 AM	PH3 valve closed
4/13/2011	11:43:52 AM	SiCl4 pre valve closed
4/13/2011	11:43:52 AM	SiCl4 post valve closed
4/13/2011	11:43:52 AM	Bubbler valve closed
4/13/2011	11:43:52 AM	Helium valve opened
4/13/2011	11:43:52 AM	Main Vac valve opened
4/13/2011	11:43:52 AM	Bypass valve opened
4/13/2011	11:43:52 AM	Helium MFC set to  100.000000
4/13/2011	11:43:52 AM	H2 MFC set to  0.000000
4/13/2011	11:43:52 AM	BCl3 MFC set to  0.000000
4/13/2011	11:43:52 AM	PHl3 MFC set to  0.000000
4/13/2011	11:43:53 AM	SiCl4 MFC set to  0.000000
4/13/2011	11:43:53 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	11:43:53 AM	Tube furnace set to 0
4/13/2011	11:44:53 AM	Helium valve closed
4/13/2011	11:44:53 AM	H2 valve closed
4/13/2011	11:44:53 AM	BCl3 valve closed
4/13/2011	11:44:53 AM	PH3 valve closed
4/13/2011	11:44:53 AM	SiCl4 pre valve closed
4/13/2011	11:44:53 AM	SiCl4 post valve closed
4/13/2011	11:44:53 AM	Bubbler valve closed
4/13/2011	11:44:53 AM	Main Vac valve opened
4/13/2011	11:44:53 AM	Bypass valve opened
4/13/2011	11:44:53 AM	Helium MFC set to  0.000000
4/13/2011	11:44:53 AM	H2 MFC set to  0.000000
4/13/2011	11:44:53 AM	BCl3 MFC set to  0.000000
4/13/2011	11:44:53 AM	PHl3 MFC set to  0.000000
4/13/2011	11:44:53 AM	SiCl4 MFC set to  0.000000
4/13/2011	11:44:53 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	11:44:53 AM	Tube furnace set to 0
4/13/2011	11:45:53 AM	H2 valve closed
4/13/2011	11:45:53 AM	BCl3 valve closed
4/13/2011	11:45:53 AM	PH3 valve closed
4/13/2011	11:45:53 AM	SiCl4 pre valve closed
4/13/2011	11:45:53 AM	SiCl4 post valve closed
4/13/2011	11:45:53 AM	Bubbler valve closed
4/13/2011	11:45:53 AM	Helium valve opened
4/13/2011	11:45:53 AM	Main Vac valve opened
4/13/2011	11:45:53 AM	Bypass valve opened
4/13/2011	11:45:53 AM	Helium MFC set to  100.000000
4/13/2011	11:45:53 AM	H2 MFC set to  0.000000
4/13/2011	11:45:53 AM	BCl3 MFC set to  0.000000
4/13/2011	11:45:53 AM	PHl3 MFC set to  0.000000
4/13/2011	11:45:53 AM	SiCl4 MFC set to  0.000000
4/13/2011	11:45:53 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	11:45:53 AM	Tube furnace set to 0
4/13/2011	11:46:53 AM	Helium valve closed
4/13/2011	11:46:53 AM	H2 valve closed
4/13/2011	11:46:53 AM	BCl3 valve closed
4/13/2011	11:46:53 AM	PH3 valve closed
4/13/2011	11:46:53 AM	SiCl4 pre valve closed
4/13/2011	11:46:53 AM	SiCl4 post valve closed
4/13/2011	11:46:53 AM	Bubbler valve closed
4/13/2011	11:46:53 AM	Main Vac valve opened
4/13/2011	11:46:53 AM	Bypass valve opened
4/13/2011	11:46:53 AM	Helium MFC set to  0.000000
4/13/2011	11:46:53 AM	H2 MFC set to  0.000000
4/13/2011	11:46:53 AM	BCl3 MFC set to  0.000000
4/13/2011	11:46:53 AM	PHl3 MFC set to  0.000000
4/13/2011	11:46:53 AM	SiCl4 MFC set to  0.000000
4/13/2011	11:46:53 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	11:46:53 AM	Tube furnace set to 0
4/13/2011	11:47:53 AM	H2 valve closed
4/13/2011	11:47:53 AM	BCl3 valve closed
4/13/2011	11:47:53 AM	PH3 valve closed
4/13/2011	11:47:53 AM	SiCl4 pre valve closed
4/13/2011	11:47:53 AM	SiCl4 post valve closed
4/13/2011	11:47:53 AM	Bubbler valve closed
4/13/2011	11:47:53 AM	Helium valve opened
4/13/2011	11:47:53 AM	Main Vac valve opened
4/13/2011	11:47:53 AM	Bypass valve opened
4/13/2011	11:47:53 AM	Helium MFC set to  100.000000
4/13/2011	11:47:53 AM	H2 MFC set to  0.000000
4/13/2011	11:47:53 AM	BCl3 MFC set to  0.000000
4/13/2011	11:47:53 AM	PHl3 MFC set to  0.000000
4/13/2011	11:47:53 AM	SiCl4 MFC set to  0.000000
4/13/2011	11:47:53 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	11:47:53 AM	Tube furnace set to 0
4/13/2011	11:48:54 AM	Helium valve closed
4/13/2011	11:48:54 AM	H2 valve closed
4/13/2011	11:48:54 AM	BCl3 valve closed
4/13/2011	11:48:54 AM	PH3 valve closed
4/13/2011	11:48:54 AM	SiCl4 pre valve closed
4/13/2011	11:48:54 AM	SiCl4 post valve closed
4/13/2011	11:48:54 AM	Bubbler valve closed
4/13/2011	11:48:54 AM	Main Vac valve opened
4/13/2011	11:48:54 AM	Bypass valve opened
4/13/2011	11:48:54 AM	Helium MFC set to  0.000000
4/13/2011	11:48:54 AM	H2 MFC set to  0.000000
4/13/2011	11:48:54 AM	BCl3 MFC set to  0.000000
4/13/2011	11:48:54 AM	PHl3 MFC set to  0.000000
4/13/2011	11:48:54 AM	SiCl4 MFC set to  0.000000
4/13/2011	11:48:54 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	11:48:54 AM	Tube furnace set to 0
4/13/2011	11:49:54 AM	H2 valve closed
4/13/2011	11:49:54 AM	BCl3 valve closed
4/13/2011	11:49:54 AM	PH3 valve closed
4/13/2011	11:49:54 AM	SiCl4 pre valve closed
4/13/2011	11:49:54 AM	SiCl4 post valve closed
4/13/2011	11:49:54 AM	Bubbler valve closed
4/13/2011	11:49:54 AM	Helium valve opened
4/13/2011	11:49:54 AM	Main Vac valve opened
4/13/2011	11:49:54 AM	Bypass valve opened
4/13/2011	11:49:54 AM	Helium MFC set to  100.000000
4/13/2011	11:49:54 AM	H2 MFC set to  0.000000
4/13/2011	11:49:54 AM	BCl3 MFC set to  0.000000
4/13/2011	11:49:54 AM	PHl3 MFC set to  0.000000
4/13/2011	11:49:54 AM	SiCl4 MFC set to  0.000000
4/13/2011	11:49:54 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	11:49:54 AM	Tube furnace set to 0
4/13/2011	11:50:54 AM	Helium valve closed
4/13/2011	11:50:54 AM	H2 valve closed
4/13/2011	11:50:54 AM	BCl3 valve closed
4/13/2011	11:50:54 AM	PH3 valve closed
4/13/2011	11:50:54 AM	SiCl4 pre valve closed
4/13/2011	11:50:54 AM	SiCl4 post valve closed
4/13/2011	11:50:54 AM	Bubbler valve closed
4/13/2011	11:50:54 AM	Main Vac valve opened
4/13/2011	11:50:54 AM	Bypass valve opened
4/13/2011	11:50:54 AM	Helium MFC set to  0.000000
4/13/2011	11:50:54 AM	H2 MFC set to  0.000000
4/13/2011	11:50:54 AM	BCl3 MFC set to  0.000000
4/13/2011	11:50:54 AM	PHl3 MFC set to  0.000000
4/13/2011	11:50:54 AM	SiCl4 MFC set to  0.000000
4/13/2011	11:50:54 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	11:50:54 AM	Tube furnace set to 0
4/13/2011	11:51:54 AM	H2 valve closed
4/13/2011	11:51:54 AM	BCl3 valve closed
4/13/2011	11:51:54 AM	PH3 valve closed
4/13/2011	11:51:54 AM	SiCl4 pre valve closed
4/13/2011	11:51:54 AM	SiCl4 post valve closed
4/13/2011	11:51:54 AM	Bubbler valve closed
4/13/2011	11:51:54 AM	Helium valve opened
4/13/2011	11:51:54 AM	Main Vac valve opened
4/13/2011	11:51:54 AM	Bypass valve opened
4/13/2011	11:51:54 AM	Helium MFC set to  100.000000
4/13/2011	11:51:54 AM	H2 MFC set to  0.000000
4/13/2011	11:51:54 AM	BCl3 MFC set to  0.000000
4/13/2011	11:51:54 AM	PHl3 MFC set to  0.000000
4/13/2011	11:51:54 AM	SiCl4 MFC set to  0.000000
4/13/2011	11:51:54 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	11:51:54 AM	Tube furnace set to 0
4/13/2011	11:52:54 AM	Helium valve closed
4/13/2011	11:52:54 AM	H2 valve closed
4/13/2011	11:52:54 AM	BCl3 valve closed
4/13/2011	11:52:54 AM	PH3 valve closed
4/13/2011	11:52:54 AM	SiCl4 pre valve closed
4/13/2011	11:52:54 AM	SiCl4 post valve closed
4/13/2011	11:52:54 AM	Bubbler valve closed
4/13/2011	11:52:54 AM	Main Vac valve opened
4/13/2011	11:52:54 AM	Bypass valve opened
4/13/2011	11:52:54 AM	Helium MFC set to  0.000000
4/13/2011	11:52:54 AM	H2 MFC set to  0.000000
4/13/2011	11:52:54 AM	BCl3 MFC set to  0.000000
4/13/2011	11:52:54 AM	PHl3 MFC set to  0.000000
4/13/2011	11:52:54 AM	SiCl4 MFC set to  0.000000
4/13/2011	11:52:54 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	11:52:54 AM	Tube furnace set to 0
4/13/2011	11:53:55 AM	H2 valve closed
4/13/2011	11:53:55 AM	BCl3 valve closed
4/13/2011	11:53:55 AM	PH3 valve closed
4/13/2011	11:53:55 AM	SiCl4 pre valve closed
4/13/2011	11:53:55 AM	SiCl4 post valve closed
4/13/2011	11:53:55 AM	Bubbler valve closed
4/13/2011	11:53:55 AM	Helium valve opened
4/13/2011	11:53:55 AM	Main Vac valve opened
4/13/2011	11:53:55 AM	Bypass valve opened
4/13/2011	11:53:55 AM	Helium MFC set to  100.000000
4/13/2011	11:53:55 AM	H2 MFC set to  0.000000
4/13/2011	11:53:55 AM	BCl3 MFC set to  0.000000
4/13/2011	11:53:55 AM	PHl3 MFC set to  0.000000
4/13/2011	11:53:55 AM	SiCl4 MFC set to  0.000000
4/13/2011	11:53:55 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	11:53:55 AM	Tube furnace set to 0
4/13/2011	11:54:55 AM	Helium valve closed
4/13/2011	11:54:55 AM	H2 valve closed
4/13/2011	11:54:55 AM	BCl3 valve closed
4/13/2011	11:54:55 AM	PH3 valve closed
4/13/2011	11:54:55 AM	SiCl4 pre valve closed
4/13/2011	11:54:55 AM	SiCl4 post valve closed
4/13/2011	11:54:55 AM	Bubbler valve closed
4/13/2011	11:54:55 AM	Main Vac valve opened
4/13/2011	11:54:55 AM	Bypass valve opened
4/13/2011	11:54:55 AM	Helium MFC set to  0.000000
4/13/2011	11:54:55 AM	H2 MFC set to  0.000000
4/13/2011	11:54:55 AM	BCl3 MFC set to  0.000000
4/13/2011	11:54:55 AM	PHl3 MFC set to  0.000000
4/13/2011	11:54:55 AM	SiCl4 MFC set to  0.000000
4/13/2011	11:54:55 AM	Bypass solenoid MFC set to  0.000000
4/13/2011	11:54:55 AM	Tube furnace set to 0
4/13/2011	11:54:56 AM	Run finished at 11:54 AM
4/13/2011	11:54:56 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/13/2011	12:04:23 PM	Recipe started at 12:04 PM
4/13/2011	12:04:23 PM	Helium valve closed
4/13/2011	12:04:23 PM	BCl3 valve closed
4/13/2011	12:04:23 PM	PH3 valve closed
4/13/2011	12:04:23 PM	SiCl4 pre valve closed
4/13/2011	12:04:23 PM	SiCl4 post valve closed
4/13/2011	12:04:23 PM	Main Vac valve closed
4/13/2011	12:04:23 PM	Bypass valve closed
4/13/2011	12:04:23 PM	Bubbler valve closed
4/13/2011	12:04:23 PM	H2 valve opened
4/13/2011	12:04:23 PM	Helium MFC set to  0.000000
4/13/2011	12:04:23 PM	H2 MFC set to  500.000000
4/13/2011	12:04:23 PM	BCl3 MFC set to  0.000000
4/13/2011	12:04:23 PM	PHl3 MFC set to  0.000000
4/13/2011	12:04:23 PM	SiCl4 MFC set to  0.000000
4/13/2011	12:04:23 PM	Bypass solenoid MFC set to  0.000000
4/13/2011	12:04:23 PM	Tube furnace set to 0
4/13/2011	12:05:43 PM	Helium valve closed
4/13/2011	12:05:43 PM	BCl3 valve closed
4/13/2011	12:05:43 PM	PH3 valve closed
4/13/2011	12:05:43 PM	SiCl4 pre valve closed
4/13/2011	12:05:43 PM	SiCl4 post valve closed
4/13/2011	12:05:43 PM	Main Vac valve closed
4/13/2011	12:05:43 PM	Bypass valve closed
4/13/2011	12:05:43 PM	H2 valve opened
4/13/2011	12:05:43 PM	Bubbler valve opened
4/13/2011	12:05:43 PM	Helium MFC set to  0.000000
4/13/2011	12:05:43 PM	H2 MFC set to  500.000000
4/13/2011	12:05:43 PM	BCl3 MFC set to  0.000000
4/13/2011	12:05:43 PM	PHl3 MFC set to  0.000000
4/13/2011	12:05:43 PM	SiCl4 MFC set to  0.000000
4/13/2011	12:05:43 PM	Bypass solenoid MFC set to  0.000000
4/13/2011	12:05:43 PM	Tube furnace set to 1000
4/13/2011	12:25:43 PM	Helium valve closed
4/13/2011	12:25:43 PM	PH3 valve closed
4/13/2011	12:25:43 PM	Main Vac valve closed
4/13/2011	12:25:43 PM	Bypass valve closed
4/13/2011	12:25:43 PM	H2 valve opened
4/13/2011	12:25:43 PM	BCl3 valve opened
4/13/2011	12:25:43 PM	SiCl4 pre valve opened
4/13/2011	12:25:43 PM	SiCl4 post valve opened
4/13/2011	12:25:43 PM	Bubbler valve opened
4/13/2011	12:25:43 PM	Helium MFC set to  0.000000
4/13/2011	12:25:43 PM	H2 MFC set to  500.000000
4/13/2011	12:25:43 PM	BCl3 MFC set to  3.000000
4/13/2011	12:25:43 PM	PHl3 MFC set to  0.000000
4/13/2011	12:25:43 PM	SiCl4 MFC set to  50.000000
4/13/2011	12:25:43 PM	Bypass solenoid MFC set to  0.000000
4/13/2011	12:25:43 PM	Tube furnace set to 1000
4/13/2011	12:45:43 PM	H2 valve closed
4/13/2011	12:45:43 PM	BCl3 valve closed
4/13/2011	12:45:43 PM	PH3 valve closed
4/13/2011	12:45:43 PM	SiCl4 pre valve closed
4/13/2011	12:45:43 PM	SiCl4 post valve closed
4/13/2011	12:45:43 PM	Main Vac valve closed
4/13/2011	12:45:43 PM	Bypass valve closed
4/13/2011	12:45:43 PM	Helium valve opened
4/13/2011	12:45:43 PM	Bubbler valve opened
4/13/2011	12:45:43 PM	Helium MFC set to  500.000000
4/13/2011	12:45:43 PM	H2 MFC set to  0.000000
4/13/2011	12:45:43 PM	BCl3 MFC set to  0.000000
4/13/2011	12:45:43 PM	PHl3 MFC set to  0.000000
4/13/2011	12:45:43 PM	SiCl4 MFC set to  0.000000
4/13/2011	12:45:43 PM	Bypass solenoid MFC set to  0.000000
4/13/2011	12:45:43 PM	Tube furnace set to 0
4/13/2011	1:05:43 PM	Helium valve closed
4/13/2011	1:05:43 PM	H2 valve closed
4/13/2011	1:05:43 PM	BCl3 valve closed
4/13/2011	1:05:43 PM	PH3 valve closed
4/13/2011	1:05:43 PM	SiCl4 pre valve closed
4/13/2011	1:05:43 PM	SiCl4 post valve closed
4/13/2011	1:05:43 PM	Main Vac valve closed
4/13/2011	1:05:43 PM	Bypass valve closed
4/13/2011	1:05:43 PM	Bubbler valve closed
4/13/2011	1:05:43 PM	Helium MFC set to  0.000000
4/13/2011	1:05:43 PM	H2 MFC set to  0.000000
4/13/2011	1:05:43 PM	BCl3 MFC set to  0.000000
4/13/2011	1:05:43 PM	PHl3 MFC set to  0.000000
4/13/2011	1:05:43 PM	SiCl4 MFC set to  0.000000
4/13/2011	1:05:43 PM	Bypass solenoid MFC set to  0.000000
4/13/2011	1:05:44 PM	Tube furnace set to 0
4/13/2011	1:05:44 PM	Run finished at 1:05 PM
4/13/2011	1:43:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/13/2011	1:43:15 PM	Recipe started at 1:43 PM
4/13/2011	1:43:15 PM	H2 valve closed
4/13/2011	1:43:15 PM	BCl3 valve closed
4/13/2011	1:43:15 PM	PH3 valve closed
4/13/2011	1:43:16 PM	SiCl4 pre valve closed
4/13/2011	1:43:16 PM	SiCl4 post valve closed
4/13/2011	1:43:16 PM	Main Vac valve closed
4/13/2011	1:43:16 PM	Bypass valve closed
4/13/2011	1:43:16 PM	Bubbler valve closed
4/13/2011	1:43:16 PM	Helium valve opened
4/13/2011	1:43:16 PM	Helium MFC set to  500.000000
4/13/2011	1:43:16 PM	H2 MFC set to  0.000000
4/13/2011	1:43:16 PM	BCl3 MFC set to  0.000000
4/13/2011	1:43:16 PM	PHl3 MFC set to  0.000000
4/13/2011	1:43:16 PM	SiCl4 MFC set to  0.000000
4/13/2011	1:43:16 PM	Bypass solenoid MFC set to  0.000000
4/13/2011	1:43:16 PM	Tube furnace set to 0
4/13/2011	1:43:20 PM	Helium valve closed
4/13/2011	1:43:20 PM	H2 valve closed
4/13/2011	1:43:20 PM	BCl3 valve closed
4/13/2011	1:43:20 PM	PH3 valve closed
4/13/2011	1:43:20 PM	SiCl4 pre valve closed
4/13/2011	1:43:20 PM	SiCl4 post valve closed
4/13/2011	1:43:20 PM	Main Vac valve closed
4/13/2011	1:43:20 PM	Bypass valve closed
4/13/2011	1:43:20 PM	Bubbler valve closed
4/13/2011	1:43:20 PM	Helium MFC set to  0.000000
4/13/2011	1:43:20 PM	H2 MFC set to  0.000000
4/13/2011	1:43:20 PM	BCl3 MFC set to  0.000000
4/13/2011	1:43:20 PM	PHl3 MFC set to  0.000000
4/13/2011	1:43:20 PM	SiCl4 MFC set to  0.000000
4/13/2011	1:43:20 PM	Bypass solenoid MFC set to  0.000000
4/13/2011	1:43:20 PM	Tube furnace set to 0
4/13/2011	1:43:20 PM	Run finished at 1:43 PM
4/13/2011	1:43:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/13/2011	1:49:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/13/2011	1:49:29 PM	Recipe started at 1:49 PM
4/13/2011	1:49:29 PM	Helium valve closed
4/13/2011	1:49:29 PM	H2 valve closed
4/13/2011	1:49:29 PM	BCl3 valve closed
4/13/2011	1:49:29 PM	PH3 valve closed
4/13/2011	1:49:29 PM	SiCl4 pre valve closed
4/13/2011	1:49:29 PM	SiCl4 post valve closed
4/13/2011	1:49:29 PM	Main Vac valve closed
4/13/2011	1:49:29 PM	Bubbler valve closed
4/13/2011	1:49:29 PM	Bypass valve opened
4/13/2011	1:49:29 PM	Helium MFC set to  0.000000
4/13/2011	1:49:29 PM	H2 MFC set to  0.000000
4/13/2011	1:49:29 PM	BCl3 MFC set to  0.000000
4/13/2011	1:49:29 PM	PHl3 MFC set to  0.000000
4/13/2011	1:49:29 PM	SiCl4 MFC set to  0.000000
4/13/2011	1:49:29 PM	Bypass solenoid MFC set to  0.000000
4/13/2011	1:49:29 PM	Tube furnace set to 0
4/13/2011	1:50:02 PM	Helium valve closed
4/13/2011	1:50:02 PM	H2 valve closed
4/13/2011	1:50:02 PM	BCl3 valve closed
4/13/2011	1:50:02 PM	PH3 valve closed
4/13/2011	1:50:02 PM	SiCl4 pre valve closed
4/13/2011	1:50:02 PM	SiCl4 post valve closed
4/13/2011	1:50:02 PM	Bubbler valve closed
4/13/2011	1:50:02 PM	Main Vac valve opened
4/13/2011	1:50:02 PM	Bypass valve opened
4/13/2011	1:50:02 PM	Helium MFC set to  0.000000
4/13/2011	1:50:02 PM	H2 MFC set to  0.000000
4/13/2011	1:50:02 PM	BCl3 MFC set to  0.000000
4/13/2011	1:50:02 PM	PHl3 MFC set to  0.000000
4/13/2011	1:50:02 PM	SiCl4 MFC set to  0.000000
4/13/2011	1:50:02 PM	Bypass solenoid MFC set to  0.000000
4/13/2011	1:50:02 PM	Tube furnace set to 0
4/13/2011	1:51:02 PM	H2 valve closed
4/13/2011	1:51:02 PM	BCl3 valve closed
4/13/2011	1:51:02 PM	PH3 valve closed
4/13/2011	1:51:02 PM	SiCl4 pre valve closed
4/13/2011	1:51:02 PM	SiCl4 post valve closed
4/13/2011	1:51:02 PM	Bubbler valve closed
4/13/2011	1:51:02 PM	Helium valve opened
4/13/2011	1:51:02 PM	Main Vac valve opened
4/13/2011	1:51:02 PM	Bypass valve opened
4/13/2011	1:51:02 PM	Helium MFC set to  100.000000
4/13/2011	1:51:02 PM	H2 MFC set to  0.000000
4/13/2011	1:51:02 PM	BCl3 MFC set to  0.000000
4/13/2011	1:51:02 PM	PHl3 MFC set to  0.000000
4/13/2011	1:51:02 PM	SiCl4 MFC set to  0.000000
4/13/2011	1:51:02 PM	Bypass solenoid MFC set to  0.000000
4/13/2011	1:51:02 PM	Tube furnace set to 0
4/13/2011	1:52:02 PM	Helium valve closed
4/13/2011	1:52:02 PM	H2 valve closed
4/13/2011	1:52:02 PM	BCl3 valve closed
4/13/2011	1:52:02 PM	PH3 valve closed
4/13/2011	1:52:02 PM	SiCl4 pre valve closed
4/13/2011	1:52:02 PM	SiCl4 post valve closed
4/13/2011	1:52:02 PM	Bubbler valve closed
4/13/2011	1:52:02 PM	Main Vac valve opened
4/13/2011	1:52:02 PM	Bypass valve opened
4/13/2011	1:52:02 PM	Helium MFC set to  0.000000
4/13/2011	1:52:02 PM	H2 MFC set to  0.000000
4/13/2011	1:52:02 PM	BCl3 MFC set to  0.000000
4/13/2011	1:52:02 PM	PHl3 MFC set to  0.000000
4/13/2011	1:52:02 PM	SiCl4 MFC set to  0.000000
4/13/2011	1:52:02 PM	Bypass solenoid MFC set to  0.000000
4/13/2011	1:52:02 PM	Tube furnace set to 0
4/13/2011	1:53:03 PM	H2 valve closed
4/13/2011	1:53:03 PM	BCl3 valve closed
4/13/2011	1:53:03 PM	PH3 valve closed
4/13/2011	1:53:03 PM	SiCl4 pre valve closed
4/13/2011	1:53:03 PM	SiCl4 post valve closed
4/13/2011	1:53:03 PM	Bubbler valve closed
4/13/2011	1:53:03 PM	Helium valve opened
4/13/2011	1:53:03 PM	Main Vac valve opened
4/13/2011	1:53:03 PM	Bypass valve opened
4/13/2011	1:53:03 PM	Helium MFC set to  100.000000
4/13/2011	1:53:03 PM	H2 MFC set to  0.000000
4/13/2011	1:53:03 PM	BCl3 MFC set to  0.000000
4/13/2011	1:53:03 PM	PHl3 MFC set to  0.000000
4/13/2011	1:53:03 PM	SiCl4 MFC set to  0.000000
4/13/2011	1:53:03 PM	Bypass solenoid MFC set to  0.000000
4/13/2011	1:53:03 PM	Tube furnace set to 0
4/13/2011	1:54:03 PM	Helium valve closed
4/13/2011	1:54:03 PM	H2 valve closed
4/13/2011	1:54:03 PM	BCl3 valve closed
4/13/2011	1:54:03 PM	PH3 valve closed
4/13/2011	1:54:03 PM	SiCl4 pre valve closed
4/13/2011	1:54:03 PM	SiCl4 post valve closed
4/13/2011	1:54:03 PM	Bubbler valve closed
4/13/2011	1:54:03 PM	Main Vac valve opened
4/13/2011	1:54:03 PM	Bypass valve opened
4/13/2011	1:54:03 PM	Helium MFC set to  0.000000
4/13/2011	1:54:03 PM	H2 MFC set to  0.000000
4/13/2011	1:54:03 PM	BCl3 MFC set to  0.000000
4/13/2011	1:54:03 PM	PHl3 MFC set to  0.000000
4/13/2011	1:54:03 PM	SiCl4 MFC set to  0.000000
4/13/2011	1:54:03 PM	Bypass solenoid MFC set to  0.000000
4/13/2011	1:54:03 PM	Tube furnace set to 0
4/13/2011	1:55:03 PM	H2 valve closed
4/13/2011	1:55:03 PM	BCl3 valve closed
4/13/2011	1:55:03 PM	PH3 valve closed
4/13/2011	1:55:03 PM	SiCl4 pre valve closed
4/13/2011	1:55:03 PM	SiCl4 post valve closed
4/13/2011	1:55:03 PM	Bubbler valve closed
4/13/2011	1:55:03 PM	Helium valve opened
4/13/2011	1:55:03 PM	Main Vac valve opened
4/13/2011	1:55:03 PM	Bypass valve opened
4/13/2011	1:55:03 PM	Helium MFC set to  100.000000
4/13/2011	1:55:03 PM	H2 MFC set to  0.000000
4/13/2011	1:55:03 PM	BCl3 MFC set to  0.000000
4/13/2011	1:55:03 PM	PHl3 MFC set to  0.000000
4/13/2011	1:55:03 PM	SiCl4 MFC set to  0.000000
4/13/2011	1:55:03 PM	Bypass solenoid MFC set to  0.000000
4/13/2011	1:55:03 PM	Tube furnace set to 0
4/13/2011	1:56:03 PM	Helium valve closed
4/13/2011	1:56:03 PM	H2 valve closed
4/13/2011	1:56:03 PM	BCl3 valve closed
4/13/2011	1:56:03 PM	PH3 valve closed
4/13/2011	1:56:03 PM	SiCl4 pre valve closed
4/13/2011	1:56:03 PM	SiCl4 post valve closed
4/13/2011	1:56:03 PM	Bubbler valve closed
4/13/2011	1:56:03 PM	Main Vac valve opened
4/13/2011	1:56:03 PM	Bypass valve opened
4/13/2011	1:56:03 PM	Helium MFC set to  0.000000
4/13/2011	1:56:03 PM	H2 MFC set to  0.000000
4/13/2011	1:56:03 PM	BCl3 MFC set to  0.000000
4/13/2011	1:56:03 PM	PHl3 MFC set to  0.000000
4/13/2011	1:56:03 PM	SiCl4 MFC set to  0.000000
4/13/2011	1:56:03 PM	Bypass solenoid MFC set to  0.000000
4/13/2011	1:56:03 PM	Tube furnace set to 0
4/13/2011	1:57:03 PM	H2 valve closed
4/13/2011	1:57:03 PM	BCl3 valve closed
4/13/2011	1:57:03 PM	PH3 valve closed
4/13/2011	1:57:03 PM	SiCl4 pre valve closed
4/13/2011	1:57:03 PM	SiCl4 post valve closed
4/13/2011	1:57:03 PM	Bubbler valve closed
4/13/2011	1:57:03 PM	Helium valve opened
4/13/2011	1:57:03 PM	Main Vac valve opened
4/13/2011	1:57:03 PM	Bypass valve opened
4/13/2011	1:57:03 PM	Helium MFC set to  100.000000
4/13/2011	1:57:03 PM	H2 MFC set to  0.000000
4/13/2011	1:57:03 PM	BCl3 MFC set to  0.000000
4/13/2011	1:57:03 PM	PHl3 MFC set to  0.000000
4/13/2011	1:57:03 PM	SiCl4 MFC set to  0.000000
4/13/2011	1:57:03 PM	Bypass solenoid MFC set to  0.000000
4/13/2011	1:57:04 PM	Tube furnace set to 0
4/13/2011	1:58:04 PM	Helium valve closed
4/13/2011	1:58:04 PM	H2 valve closed
4/13/2011	1:58:04 PM	BCl3 valve closed
4/13/2011	1:58:04 PM	PH3 valve closed
4/13/2011	1:58:04 PM	SiCl4 pre valve closed
4/13/2011	1:58:04 PM	SiCl4 post valve closed
4/13/2011	1:58:04 PM	Bubbler valve closed
4/13/2011	1:58:04 PM	Main Vac valve opened
4/13/2011	1:58:04 PM	Bypass valve opened
4/13/2011	1:58:04 PM	Helium MFC set to  0.000000
4/13/2011	1:58:04 PM	H2 MFC set to  0.000000
4/13/2011	1:58:04 PM	BCl3 MFC set to  0.000000
4/13/2011	1:58:04 PM	PHl3 MFC set to  0.000000
4/13/2011	1:58:04 PM	SiCl4 MFC set to  0.000000
4/13/2011	1:58:04 PM	Bypass solenoid MFC set to  0.000000
4/13/2011	1:58:04 PM	Tube furnace set to 0
4/13/2011	1:59:04 PM	H2 valve closed
4/13/2011	1:59:04 PM	BCl3 valve closed
4/13/2011	1:59:04 PM	PH3 valve closed
4/13/2011	1:59:04 PM	SiCl4 pre valve closed
4/13/2011	1:59:04 PM	SiCl4 post valve closed
4/13/2011	1:59:04 PM	Bubbler valve closed
4/13/2011	1:59:04 PM	Helium valve opened
4/13/2011	1:59:04 PM	Main Vac valve opened
4/13/2011	1:59:04 PM	Bypass valve opened
4/13/2011	1:59:04 PM	Helium MFC set to  100.000000
4/13/2011	1:59:04 PM	H2 MFC set to  0.000000
4/13/2011	1:59:04 PM	BCl3 MFC set to  0.000000
4/13/2011	1:59:04 PM	PHl3 MFC set to  0.000000
4/13/2011	1:59:04 PM	SiCl4 MFC set to  0.000000
4/13/2011	1:59:04 PM	Bypass solenoid MFC set to  0.000000
4/13/2011	1:59:04 PM	Tube furnace set to 0
4/13/2011	2:00:04 PM	Helium valve closed
4/13/2011	2:00:04 PM	H2 valve closed
4/13/2011	2:00:04 PM	BCl3 valve closed
4/13/2011	2:00:04 PM	PH3 valve closed
4/13/2011	2:00:04 PM	SiCl4 pre valve closed
4/13/2011	2:00:04 PM	SiCl4 post valve closed
4/13/2011	2:00:04 PM	Bubbler valve closed
4/13/2011	2:00:04 PM	Main Vac valve opened
4/13/2011	2:00:04 PM	Bypass valve opened
4/13/2011	2:00:04 PM	Helium MFC set to  0.000000
4/13/2011	2:00:04 PM	H2 MFC set to  0.000000
4/13/2011	2:00:04 PM	BCl3 MFC set to  0.000000
4/13/2011	2:00:04 PM	PHl3 MFC set to  0.000000
4/13/2011	2:00:04 PM	SiCl4 MFC set to  0.000000
4/13/2011	2:00:04 PM	Bypass solenoid MFC set to  0.000000
4/13/2011	2:00:04 PM	Tube furnace set to 0
4/13/2011	2:01:04 PM	H2 valve closed
4/13/2011	2:01:04 PM	BCl3 valve closed
4/13/2011	2:01:04 PM	PH3 valve closed
4/13/2011	2:01:04 PM	SiCl4 pre valve closed
4/13/2011	2:01:04 PM	SiCl4 post valve closed
4/13/2011	2:01:04 PM	Bubbler valve closed
4/13/2011	2:01:04 PM	Helium valve opened
4/13/2011	2:01:04 PM	Main Vac valve opened
4/13/2011	2:01:04 PM	Bypass valve opened
4/13/2011	2:01:04 PM	Helium MFC set to  100.000000
4/13/2011	2:01:04 PM	H2 MFC set to  0.000000
4/13/2011	2:01:04 PM	BCl3 MFC set to  0.000000
4/13/2011	2:01:04 PM	PHl3 MFC set to  0.000000
4/13/2011	2:01:04 PM	SiCl4 MFC set to  0.000000
4/13/2011	2:01:04 PM	Bypass solenoid MFC set to  0.000000
4/13/2011	2:01:04 PM	Tube furnace set to 0
4/13/2011	2:02:04 PM	Helium valve closed
4/13/2011	2:02:04 PM	H2 valve closed
4/13/2011	2:02:04 PM	BCl3 valve closed
4/13/2011	2:02:04 PM	PH3 valve closed
4/13/2011	2:02:04 PM	SiCl4 pre valve closed
4/13/2011	2:02:04 PM	SiCl4 post valve closed
4/13/2011	2:02:04 PM	Bubbler valve closed
4/13/2011	2:02:04 PM	Main Vac valve opened
4/13/2011	2:02:04 PM	Bypass valve opened
4/13/2011	2:02:04 PM	Helium MFC set to  0.000000
4/13/2011	2:02:04 PM	H2 MFC set to  0.000000
4/13/2011	2:02:04 PM	BCl3 MFC set to  0.000000
4/13/2011	2:02:04 PM	PHl3 MFC set to  0.000000
4/13/2011	2:02:04 PM	SiCl4 MFC set to  0.000000
4/13/2011	2:02:04 PM	Bypass solenoid MFC set to  0.000000
4/13/2011	2:02:05 PM	Tube furnace set to 0
4/13/2011	2:03:05 PM	H2 valve closed
4/13/2011	2:03:05 PM	BCl3 valve closed
4/13/2011	2:03:05 PM	PH3 valve closed
4/13/2011	2:03:05 PM	SiCl4 pre valve closed
4/13/2011	2:03:05 PM	SiCl4 post valve closed
4/13/2011	2:03:05 PM	Bubbler valve closed
4/13/2011	2:03:05 PM	Helium valve opened
4/13/2011	2:03:05 PM	Main Vac valve opened
4/13/2011	2:03:05 PM	Bypass valve opened
4/13/2011	2:03:05 PM	Helium MFC set to  100.000000
4/13/2011	2:03:05 PM	H2 MFC set to  0.000000
4/13/2011	2:03:05 PM	BCl3 MFC set to  0.000000
4/13/2011	2:03:05 PM	PHl3 MFC set to  0.000000
4/13/2011	2:03:05 PM	SiCl4 MFC set to  0.000000
4/13/2011	2:03:05 PM	Bypass solenoid MFC set to  0.000000
4/13/2011	2:03:05 PM	Tube furnace set to 0
4/13/2011	2:04:05 PM	Helium valve closed
4/13/2011	2:04:05 PM	H2 valve closed
4/13/2011	2:04:05 PM	BCl3 valve closed
4/13/2011	2:04:05 PM	PH3 valve closed
4/13/2011	2:04:05 PM	SiCl4 pre valve closed
4/13/2011	2:04:05 PM	SiCl4 post valve closed
4/13/2011	2:04:05 PM	Bubbler valve closed
4/13/2011	2:04:05 PM	Main Vac valve opened
4/13/2011	2:04:05 PM	Bypass valve opened
4/13/2011	2:04:05 PM	Helium MFC set to  0.000000
4/13/2011	2:04:05 PM	H2 MFC set to  0.000000
4/13/2011	2:04:05 PM	BCl3 MFC set to  0.000000
4/13/2011	2:04:05 PM	PHl3 MFC set to  0.000000
4/13/2011	2:04:05 PM	SiCl4 MFC set to  0.000000
4/13/2011	2:04:05 PM	Bypass solenoid MFC set to  0.000000
4/13/2011	2:04:05 PM	Tube furnace set to 0
4/13/2011	2:05:05 PM	H2 valve closed
4/13/2011	2:05:05 PM	BCl3 valve closed
4/13/2011	2:05:05 PM	PH3 valve closed
4/13/2011	2:05:05 PM	SiCl4 pre valve closed
4/13/2011	2:05:05 PM	SiCl4 post valve closed
4/13/2011	2:05:05 PM	Bubbler valve closed
4/13/2011	2:05:05 PM	Helium valve opened
4/13/2011	2:05:05 PM	Main Vac valve opened
4/13/2011	2:05:05 PM	Bypass valve opened
4/13/2011	2:05:05 PM	Helium MFC set to  100.000000
4/13/2011	2:05:05 PM	H2 MFC set to  0.000000
4/13/2011	2:05:05 PM	BCl3 MFC set to  0.000000
4/13/2011	2:05:05 PM	PHl3 MFC set to  0.000000
4/13/2011	2:05:05 PM	SiCl4 MFC set to  0.000000
4/13/2011	2:05:05 PM	Bypass solenoid MFC set to  0.000000
4/13/2011	2:05:05 PM	Tube furnace set to 0
4/13/2011	2:06:05 PM	Helium valve closed
4/13/2011	2:06:05 PM	H2 valve closed
4/13/2011	2:06:05 PM	BCl3 valve closed
4/13/2011	2:06:05 PM	PH3 valve closed
4/13/2011	2:06:05 PM	SiCl4 pre valve closed
4/13/2011	2:06:05 PM	SiCl4 post valve closed
4/13/2011	2:06:05 PM	Bubbler valve closed
4/13/2011	2:06:05 PM	Main Vac valve opened
4/13/2011	2:06:05 PM	Bypass valve opened
4/13/2011	2:06:05 PM	Helium MFC set to  0.000000
4/13/2011	2:06:05 PM	H2 MFC set to  0.000000
4/13/2011	2:06:05 PM	BCl3 MFC set to  0.000000
4/13/2011	2:06:05 PM	PHl3 MFC set to  0.000000
4/13/2011	2:06:05 PM	SiCl4 MFC set to  0.000000
4/13/2011	2:06:05 PM	Bypass solenoid MFC set to  0.000000
4/13/2011	2:06:05 PM	Tube furnace set to 0
4/13/2011	2:07:05 PM	H2 valve closed
4/13/2011	2:07:05 PM	BCl3 valve closed
4/13/2011	2:07:05 PM	PH3 valve closed
4/13/2011	2:07:05 PM	SiCl4 pre valve closed
4/13/2011	2:07:05 PM	SiCl4 post valve closed
4/13/2011	2:07:05 PM	Bubbler valve closed
4/13/2011	2:07:05 PM	Helium valve opened
4/13/2011	2:07:05 PM	Main Vac valve opened
4/13/2011	2:07:05 PM	Bypass valve opened
4/13/2011	2:07:05 PM	Helium MFC set to  100.000000
4/13/2011	2:07:05 PM	H2 MFC set to  0.000000
4/13/2011	2:07:05 PM	BCl3 MFC set to  0.000000
4/13/2011	2:07:05 PM	PHl3 MFC set to  0.000000
4/13/2011	2:07:05 PM	SiCl4 MFC set to  0.000000
4/13/2011	2:07:05 PM	Bypass solenoid MFC set to  0.000000
4/13/2011	2:07:06 PM	Tube furnace set to 0
4/13/2011	2:08:06 PM	Helium valve closed
4/13/2011	2:08:06 PM	H2 valve closed
4/13/2011	2:08:06 PM	BCl3 valve closed
4/13/2011	2:08:06 PM	PH3 valve closed
4/13/2011	2:08:06 PM	SiCl4 pre valve closed
4/13/2011	2:08:06 PM	SiCl4 post valve closed
4/13/2011	2:08:06 PM	Bubbler valve closed
4/13/2011	2:08:06 PM	Main Vac valve opened
4/13/2011	2:08:06 PM	Bypass valve opened
4/13/2011	2:08:06 PM	Helium MFC set to  0.000000
4/13/2011	2:08:06 PM	H2 MFC set to  0.000000
4/13/2011	2:08:06 PM	BCl3 MFC set to  0.000000
4/13/2011	2:08:06 PM	PHl3 MFC set to  0.000000
4/13/2011	2:08:06 PM	SiCl4 MFC set to  0.000000
4/13/2011	2:08:06 PM	Bypass solenoid MFC set to  0.000000
4/13/2011	2:08:06 PM	Tube furnace set to 0
4/13/2011	2:09:06 PM	H2 valve closed
4/13/2011	2:09:06 PM	BCl3 valve closed
4/13/2011	2:09:06 PM	PH3 valve closed
4/13/2011	2:09:06 PM	SiCl4 pre valve closed
4/13/2011	2:09:06 PM	SiCl4 post valve closed
4/13/2011	2:09:06 PM	Bubbler valve closed
4/13/2011	2:09:06 PM	Helium valve opened
4/13/2011	2:09:06 PM	Main Vac valve opened
4/13/2011	2:09:06 PM	Bypass valve opened
4/13/2011	2:09:06 PM	Helium MFC set to  100.000000
4/13/2011	2:09:06 PM	H2 MFC set to  0.000000
4/13/2011	2:09:06 PM	BCl3 MFC set to  0.000000
4/13/2011	2:09:06 PM	PHl3 MFC set to  0.000000
4/13/2011	2:09:06 PM	SiCl4 MFC set to  0.000000
4/13/2011	2:09:06 PM	Bypass solenoid MFC set to  0.000000
4/13/2011	2:09:06 PM	Tube furnace set to 0
4/13/2011	2:10:06 PM	Helium valve closed
4/13/2011	2:10:06 PM	H2 valve closed
4/13/2011	2:10:06 PM	BCl3 valve closed
4/13/2011	2:10:06 PM	PH3 valve closed
4/13/2011	2:10:06 PM	SiCl4 pre valve closed
4/13/2011	2:10:06 PM	SiCl4 post valve closed
4/13/2011	2:10:06 PM	Bubbler valve closed
4/13/2011	2:10:06 PM	Main Vac valve opened
4/13/2011	2:10:06 PM	Bypass valve opened
4/13/2011	2:10:06 PM	Helium MFC set to  0.000000
4/13/2011	2:10:06 PM	H2 MFC set to  0.000000
4/13/2011	2:10:06 PM	BCl3 MFC set to  0.000000
4/13/2011	2:10:06 PM	PHl3 MFC set to  0.000000
4/13/2011	2:10:06 PM	SiCl4 MFC set to  0.000000
4/13/2011	2:10:06 PM	Bypass solenoid MFC set to  0.000000
4/13/2011	2:10:06 PM	Tube furnace set to 0
4/13/2011	2:10:07 PM	Run finished at 2:10 PM
4/13/2011	2:10:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/13/2011	2:25:51 PM	Recipe started at 2:25 PM
4/13/2011	2:25:51 PM	Helium valve closed
4/13/2011	2:25:51 PM	BCl3 valve closed
4/13/2011	2:25:51 PM	PH3 valve closed
4/13/2011	2:25:51 PM	SiCl4 pre valve closed
4/13/2011	2:25:51 PM	SiCl4 post valve closed
4/13/2011	2:25:51 PM	Main Vac valve closed
4/13/2011	2:25:51 PM	Bypass valve closed
4/13/2011	2:25:51 PM	Bubbler valve closed
4/13/2011	2:25:51 PM	H2 valve opened
4/13/2011	2:25:51 PM	Helium MFC set to  0.000000
4/13/2011	2:25:51 PM	H2 MFC set to  500.000000
4/13/2011	2:25:51 PM	BCl3 MFC set to  0.000000
4/13/2011	2:25:51 PM	PHl3 MFC set to  0.000000
4/13/2011	2:25:51 PM	SiCl4 MFC set to  0.000000
4/13/2011	2:25:51 PM	Bypass solenoid MFC set to  0.000000
4/13/2011	2:25:51 PM	Tube furnace set to 0
4/13/2011	2:27:11 PM	Helium valve closed
4/13/2011	2:27:11 PM	BCl3 valve closed
4/13/2011	2:27:11 PM	PH3 valve closed
4/13/2011	2:27:11 PM	SiCl4 pre valve closed
4/13/2011	2:27:11 PM	SiCl4 post valve closed
4/13/2011	2:27:12 PM	Main Vac valve closed
4/13/2011	2:27:12 PM	Bypass valve closed
4/13/2011	2:27:12 PM	H2 valve opened
4/13/2011	2:27:12 PM	Bubbler valve opened
4/13/2011	2:27:12 PM	Helium MFC set to  0.000000
4/13/2011	2:27:12 PM	H2 MFC set to  500.000000
4/13/2011	2:27:12 PM	BCl3 MFC set to  0.000000
4/13/2011	2:27:12 PM	PHl3 MFC set to  0.000000
4/13/2011	2:27:12 PM	SiCl4 MFC set to  0.000000
4/13/2011	2:27:12 PM	Bypass solenoid MFC set to  0.000000
4/13/2011	2:27:12 PM	Tube furnace set to 1000
4/13/2011	2:47:12 PM	Helium valve closed
4/13/2011	2:47:12 PM	PH3 valve closed
4/13/2011	2:47:12 PM	Main Vac valve closed
4/13/2011	2:47:12 PM	Bypass valve closed
4/13/2011	2:47:12 PM	H2 valve opened
4/13/2011	2:47:12 PM	BCl3 valve opened
4/13/2011	2:47:12 PM	SiCl4 pre valve opened
4/13/2011	2:47:12 PM	SiCl4 post valve opened
4/13/2011	2:47:12 PM	Bubbler valve opened
4/13/2011	2:47:12 PM	Helium MFC set to  0.000000
4/13/2011	2:47:12 PM	H2 MFC set to  500.000000
4/13/2011	2:47:12 PM	BCl3 MFC set to  3.000000
4/13/2011	2:47:12 PM	PHl3 MFC set to  0.000000
4/13/2011	2:47:12 PM	SiCl4 MFC set to  50.000000
4/13/2011	2:47:12 PM	Bypass solenoid MFC set to  0.000000
4/13/2011	2:47:12 PM	Tube furnace set to 1000
4/13/2011	3:07:12 PM	H2 valve closed
4/13/2011	3:07:12 PM	BCl3 valve closed
4/13/2011	3:07:12 PM	PH3 valve closed
4/13/2011	3:07:12 PM	SiCl4 pre valve closed
4/13/2011	3:07:12 PM	SiCl4 post valve closed
4/13/2011	3:07:12 PM	Main Vac valve closed
4/13/2011	3:07:12 PM	Bypass valve closed
4/13/2011	3:07:12 PM	Helium valve opened
4/13/2011	3:07:12 PM	Bubbler valve opened
4/13/2011	3:07:12 PM	Helium MFC set to  500.000000
4/13/2011	3:07:12 PM	H2 MFC set to  0.000000
4/13/2011	3:07:12 PM	BCl3 MFC set to  0.000000
4/13/2011	3:07:12 PM	PHl3 MFC set to  0.000000
4/13/2011	3:07:12 PM	SiCl4 MFC set to  0.000000
4/13/2011	3:07:12 PM	Bypass solenoid MFC set to  0.000000
4/13/2011	3:07:12 PM	Tube furnace set to 0
4/13/2011	3:27:12 PM	Helium valve closed
4/13/2011	3:27:12 PM	H2 valve closed
4/13/2011	3:27:12 PM	BCl3 valve closed
4/13/2011	3:27:12 PM	PH3 valve closed
4/13/2011	3:27:12 PM	SiCl4 pre valve closed
4/13/2011	3:27:12 PM	SiCl4 post valve closed
4/13/2011	3:27:12 PM	Main Vac valve closed
4/13/2011	3:27:12 PM	Bypass valve closed
4/13/2011	3:27:12 PM	Bubbler valve closed
4/13/2011	3:27:12 PM	Helium MFC set to  0.000000
4/13/2011	3:27:12 PM	H2 MFC set to  0.000000
4/13/2011	3:27:12 PM	BCl3 MFC set to  0.000000
4/13/2011	3:27:12 PM	PHl3 MFC set to  0.000000
4/13/2011	3:27:12 PM	SiCl4 MFC set to  0.000000
4/13/2011	3:27:12 PM	Bypass solenoid MFC set to  0.000000
4/13/2011	3:27:12 PM	Tube furnace set to 0
4/13/2011	3:27:12 PM	Run finished at 3:27 PM
4/13/2011	3:51:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/13/2011	3:51:18 PM	Recipe started at 3:51 PM
4/13/2011	3:51:18 PM	Helium valve closed
4/13/2011	3:51:18 PM	H2 valve closed
4/13/2011	3:51:18 PM	BCl3 valve closed
4/13/2011	3:51:18 PM	PH3 valve closed
4/13/2011	3:51:18 PM	SiCl4 pre valve closed
4/13/2011	3:51:18 PM	SiCl4 post valve closed
4/13/2011	3:51:18 PM	Main Vac valve closed
4/13/2011	3:51:18 PM	Bubbler valve closed
4/13/2011	3:51:18 PM	Bypass valve opened
4/13/2011	3:51:18 PM	Helium MFC set to  0.000000
4/13/2011	3:51:18 PM	H2 MFC set to  0.000000
4/13/2011	3:51:18 PM	BCl3 MFC set to  0.000000
4/13/2011	3:51:18 PM	PHl3 MFC set to  0.000000
4/13/2011	3:51:18 PM	SiCl4 MFC set to  0.000000
4/13/2011	3:51:18 PM	Bypass solenoid MFC set to  0.000000
4/13/2011	3:51:19 PM	Tube furnace set to 0
4/13/2011	3:51:50 PM	Helium valve closed
4/13/2011	3:51:50 PM	H2 valve closed
4/13/2011	3:51:50 PM	BCl3 valve closed
4/13/2011	3:51:50 PM	PH3 valve closed
4/13/2011	3:51:50 PM	SiCl4 pre valve closed
4/13/2011	3:51:50 PM	SiCl4 post valve closed
4/13/2011	3:51:50 PM	Bubbler valve closed
4/13/2011	3:51:50 PM	Main Vac valve opened
4/13/2011	3:51:50 PM	Bypass valve opened
4/13/2011	3:51:50 PM	Helium MFC set to  0.000000
4/13/2011	3:51:50 PM	H2 MFC set to  0.000000
4/13/2011	3:51:50 PM	BCl3 MFC set to  0.000000
4/13/2011	3:51:50 PM	PHl3 MFC set to  0.000000
4/13/2011	3:51:50 PM	SiCl4 MFC set to  0.000000
4/13/2011	3:51:50 PM	Bypass solenoid MFC set to  0.000000
4/13/2011	3:51:51 PM	Tube furnace set to 0
4/13/2011	3:51:51 PM	Run finished at 3:51 PM
4/13/2011	3:51:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/13/2011	8:19:06 PM	Tube furnace set to 100
4/13/2011	8:19:20 PM	Tube furnace set to 0
